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We design and engineer high quality photonic crystal cavities from hBN. We employ two approaches based on a focused ion beam method and a minimally-invasive electron beam induced etching (EBIE) technique to fabricate suspended 2D and 1D cavities with Q factors in excess of 2,000. Subsequently, we show deterministic, iterative tuning of individual cavities by direct-write, single-step EBIE without significant degradation of the Q-factor. The demonstration of tunable, high Q cavities made from hBN is an unprecedented advance in nanophotonics based on van der Waals materials. Our results and hBN processing methods open up promising new avenues for solid-state systems with applications in integrated quantum photonics, polaritonics and cavity QED experiments.

Rights:

• Creative Commons BY Attribution 4.0 International
  

Keyword: uantum photonic technologies, hBN, optical resonators

Date published: 2018-07-05

Publisher: Springer Science and Business Media LLC

Journal:

• Nature Communications (ISSN: 20411723) vol. 9 issue. 1

Funding:

• Australian Research Council 180100077

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1038/s41467-018-05117-4

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Updated at: 2025-02-27 12:30:32 +0900

Published on MDR: 2025-02-27 12:30:32 +0900