Calculations of Electron Inelastic Mean Free Paths   III. Data for 15 Inorganic compounds over the 50 - 2000 eV Range

Tanuma, Shigeo; Powell, C. J.; Penn, D. R.

doi:10.48505/nims.4227

Article Calculations of Electron Inelastic Mean Free Paths III. Data for 15 Inorganic compounds over the 50 - 2000 eV Range

Tanuma, Shigeo (装置開発・共用部門, 物質・材料研究機構) ; Powell, C. J. (NIST) ; Penn, D. R. (NIST)

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Tanuma, Shigeo, Powell, C. J., Penn, D. R.. Calculations of Electron Inelastic Mean Free Paths III. Data for 15 Inorganic compounds over the 50 - 2000 eV Range. Surface and Interface Analysis. 2004, 17 (13), 927-939. https://doi.org/10.48505/nims.4227

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We report calculations of electron inelastic mean free path (IMFPs) of 50-2000 eV electrons in a group of 15 inorganic compounds (Al2O3, GaAs, Gap, InAs, InP, InSb, KCl, LiF, NaCl, PbS, PbTe, SiC, Si3N4, SiO2, and ZnS). As was found in similar calculations for a group of 27 elements, there are substantial differences in the shapes of the IMFP versus energy curves from compound to compound for energies below 200 eV; these differences are associated with the different inelastic electron scattering characteristics of each material. Comparisons are made of the calculated IMFPs and the values calculated from the predictive IMFP formula TPP-2 developed from the IMFP calculations for the elements. Deviations in this comparison are found, which correlated with uncertainties of the optical data from which the IMFPs were calculated. The TPP-2 IMFP formula is therefore believed to be a more reliable means for determining IMFPs for these compounds than the direct calculations.

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This is the peer reviewed version of the following article: Calculations of Electron Inelastic Mean Free Paths III. Data for 15 Inorganic compounds over the 50 - 2000 eV Range, which has been published in final form at https://doi.org/10.1002/sia.740171305. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. This article may not be enhanced, enriched or otherwise transformed into a derivative work, without express permission from Wiley or by statutory rights under applicable legislation. Copyright notices must not be removed, obscured or modified. The article must be linked to Wiley’s version of record on Wiley Online Library and any embedding, framing or otherwise making available the article or pages thereof by third parties from platforms, services and websites other than Wiley Online Library must be prohibited.