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In assessing piezoresistive microcantilever sensitivity for surface stress sensing, the key is its capacity to translate surface stress into changes in resistance. This change hinges on the interplay between stresses and piezoresistivity. Traditional optimization has been constrained by rudimentary 1D models, overlooking potentially superior designs. Addressing this, we employed topology optimization to optimize Si(100) microcantilevers with a p-type piezoresistor. This led to optimized designs with up to 30% enhanced sensitivity over conventional designs. A recurrent "double-cantilever" configuration emerged, which optimizes longitudinal stress and reduces transverse stress at the piezoresistor, resulting in enhanced sensitivity. We developed a simplified model to analyze stress distributions in these designs. By adjusting geometrical features in this model, we identified ideal parameter combinations for optimal stress distribution. Contrary to conventional designs favoring short cantilevers, our findings redefine efficient surface stress sensing, paving the way for innovative sensor designs beyond the conventional rectangular cantilevers.

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• Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
  

  This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://dx.doi.org/10.35848/1347-4065/ad1939

Keyword: Topology optimization, nanomechanical sensors

Date published: 2024-01-01

Publisher: IOP Publishing

Journal:

• Japanese Journal of Applied Physics (ISSN: 13474065) vol. 63 issue. 1 015005

Funding:

• Japan Society for the Promotion of Science 20K20554

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4867

First published URL: https://doi.org/10.35848/1347-4065/ad1939

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Updated at: 2025-01-23 12:30:11 +0900

Published on MDR: 2025-01-23 12:30:12 +0900