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説明:

We measured the residual stress tensor in a nitrogen-doped chemical vapor deposition (001) diamond film. The stress tensor was evaluated from the amount of the shift in optically detected magnetic resonance (ODMR) spectra of NV center in the diamond. A confocal microscopy setup was used to observe the spatial variation of the stress tensor in the diamond film. We found that the components of the stress tensor, σxy, σyz, σzx, and σxx+σyy+σzz, of the residual stress were approximately 0.077, -0.39, -0.67 and 1.52 GPa, respectively in the x=[100], y=[010], z=[001] coordinate system. Regarding the components of the shear stress, σxy, σyz and σzx, the nitrogen-doped CVD diamond film grown in this study had mainly shear stress in the z-direction, which was the growth direction of the CVD diamond film. In addition, regarding axial stress σxx+σyy+σzz, the CVD diamond film was subjected to compressive stress. Due to this compressive stress, the volume of the CVD diamond film decreased by approximately 0.073%. We considered that nitrogen doping contributed to the decrease in volume of the CVD diamond film.

権利情報:

• Creative Commons BY Attribution 4.0 International
  

キーワード: diamond, stress, NV center, chemical vapor deposition

刊行年月日: 2025-12-31

出版者: Informa UK Limited

掲載誌:

• Science and Technology of Advanced Materials (ISSN: 14686996) vol. 26 issue. 1 2546779

研究助成金:

• MEXT Q-LEAP JPMXS0118068379
• MEXT Q-LEAP JPMXS0118067395
• JST Moonshot R&D JPMJMS2062
• MIC R&D for construction of a global quantum cryptography network JPMI00316
• CSTI SIP “Promoting the application of the advanced quantum technology platforms to social issues”, JST ASPIRE JPMJAP24C1
• JSPS KAKENHI 24H00406
• JSPS KAKENHI 24K22963

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1080/14686996.2025.2546779

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更新時刻: 2025-10-28 10:25:35 +0900

MDRでの公開時刻: 2025-10-28 12:16:21 +0900