Download file (2.44 MB)
Download as zip (2.21 MB)

Collection

Citation

Description:

This paper reports thin film synthesis of Li3PO4 solid electrolyte by RF magnetron sputtering. Relatively high ionic conductivity of more than 1×10-6 Scm-1 is achieved. It is revealed that crystallization of Li3PO4 impedes ionic conduction, and moderate amount of O2 addition to Ar suppresses the crystallization and guarantees long term deposition. Another important finding in this study is that when Li3PO4 is deposited on a LiCoO2 film to construct a thin-film battery, the LiCoO2 film can be damaged depending on substrate bias potential relative to the cathode potential propagated through sputtering plasma. Active control of the bias potential to avoid the damage realizes negligible interface resistance in the thin-film battery.

Rights:

• Creative Commons BY Attribution 4.0 International
  

Keyword: Battery

Date published: 2022-06-21

Publisher: American Chemical Society (ACS)

Journal:

• ACS Omega (ISSN: 24701343) vol. 7 issue. 24 p. 21199-21206

Funding:

• Ministry of Education, Culture, Sports, Science and Technology
• Japan Society for the Promotion of Science JP19H05813
• Japan Science and Technology Agency JPMJPF2016
• Advanced Low Carbon Technology Research and Development Program JPMJAL1301

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1021/acsomega.2c02104

Related item:

Other identifier(s):

Contact agent:

Updated at: 2024-09-11 08:30:20 +0900

Published on MDR: 2024-09-11 08:30:20 +0900