Article Minimizing residues and strain in 2D materials transferred from PDMS

Achint Jain ; Palash Bharadwaj ; Sebastian Heeg ; Markus Parzefall ; Takashi Taniguchi SAMURAI ORCID (National Institute for Materials Science) ; Kenji Watanabe SAMURAI ORCID (National Institute for Materials Science) ; Lukas Novotny

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Achint Jain, Palash Bharadwaj, Sebastian Heeg, Markus Parzefall, Takashi Taniguchi, Kenji Watanabe, Lukas Novotny. Minimizing residues and strain in 2D materials transferred from PDMS. Nanotechnology. 2018, 29 (26), 265203. https://doi.org/10.1088/1361-6528/aabd90
SAMURAI

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(abstract)

Integrating layered two-dimensional (2D) materials into 3D heterostructures offers opportunities for novel material functionalities and applications in electronics and photonics. We show that a simple UV-ozone pre-cleaning of the PDMS surface before exfoliation significantly reduces organic residues on transferred MoS2 flakes. An additional 200 C vacuum anneal after transfer efficiently removes interfacial bubbles and wrinkles as well as accumulated strain, thereby restoring the surface morphology of transferred flakes to their native state. Our recipe is important for building clean heterostructures of 2D materials and increasing the reproducibility and reliability of 2D devices.

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Keyword: 2D materials, heterostructures, PDMS transfer

Date published: 2018-06-29

Publisher: IOP Publishing

Journal:

  • Nanotechnology (ISSN: 13616528) vol. 29 issue. 26 265203

Funding:

  • Ministry of Education, Culture, Sports, Science and Technology JP15K21722
  • Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung 200021_165841
  • ETH Zurich ETH-32 15-1

Manuscript type: Publisher's version (Version of record)

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First published URL: https://doi.org/10.1088/1361-6528/aabd90

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Updated at: 2025-02-27 08:30:27 +0900

Published on MDR: 2025-02-27 08:30:27 +0900

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