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説明:

Integrating layered two-dimensional (2D) materials into 3D heterostructures offers opportunities for novel material functionalities and applications in electronics and photonics. We show that a simple UV-ozone pre-cleaning of the PDMS surface before exfoliation significantly reduces organic residues on transferred MoS2 flakes. An additional 200 C vacuum anneal after transfer efficiently removes interfacial bubbles and wrinkles as well as accumulated strain, thereby restoring the surface morphology of transferred flakes to their native state. Our recipe is important for building clean heterostructures of 2D materials and increasing the reproducibility and reliability of 2D devices.

権利情報:

• cc-by-3.0
  

キーワード: 2D materials, heterostructures, PDMS transfer

刊行年月日: 2018-06-29

出版者: IOP Publishing

掲載誌:

• Nanotechnology (ISSN: 13616528) vol. 29 issue. 26 265203

研究助成金:

• Ministry of Education, Culture, Sports, Science and Technology JP15K21722
• Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung 200021_165841
• ETH Zurich ETH-32 15-1

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1088/1361-6528/aabd90

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更新時刻: 2025-02-27 08:30:27 +0900

MDRでの公開時刻: 2025-02-27 08:30:27 +0900