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Diamond has been a potential rival of Si for MEMS in terms of the outstanding mechanical, electrical, thermal and chemical properties. These extreme properties not only enable developing highly reliable MEMS devices but innovating the sensitivity, precision, and stability. Here, we show the advanced research on single-crystal diamond (SCD) MEMS achieved in our lab. These include the invention of the smart-cut technology for fabricating SCD MEMS structures, energy dissipation mechanisms, and sensing/switch applications.

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  © 2025 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

Keyword: Diamond, MEMS, sensors

Date published: 2025-03-09

Publisher: IEEE

Journal:

• 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) p. 1-3

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Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.5613

First published URL: https://doi.org/10.1109/edtm61175.2025.11041141

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Updated at: 2025-07-29 16:30:25 +0900

Published on MDR: 2025-07-29 16:17:48 +0900