Akira Uedono
;
Shoji Ishibashi
;
Kohei Shima
;
Shigefusa F. Chichibu
;
Kacper Sierakowski
;
Makoto Oishi
;
Noriyuki Okada
;
Takuro Nagai
;
Michal Bockowski
Description:
(abstract)Vacancy-type defects introduced by mechanical polishing in basic ammonothermal GaN and their annealing behavior were studied using a monoenergetic positron beam. The major vacancy-type defect in the sample was identified as a Ga-vacancy (VGa) coupled with hydrogen atoms. After mechanical polishing, high-density dislocations and stacking faults were introduced in the subsurface region (< 240 nm). In this region, the vacancy-type defects detected by positron annihilation were divacancies (VGaVN) and their complexes with hydrogen atoms. After ultra-high-pressure annealing at 1400ºC, {0001} basal slip bands were the predominant defects observed using a transmission electron microscope. The major vacancy-type defects for the annealed samples were identified as VGa coupled with multiple VN [ex VGa(VN)3] and their complexes with hydrogen atoms. The observed annealing behavior of vacancies agreed with that estimated using photoluminescence spectroscopy.
Rights:
Keyword: Mechanical polishing, GaN, Vacancy, Defect, Positron annihilation
Date published: 2026-04-12
Publisher: Elsevier BV
Journal:
Funding:
Manuscript type: Author's version (Accepted manuscript)
MDR DOI: https://doi.org/10.48505/nims.6258
First published URL: https://doi.org/10.1016/j.jcrysgro.2026.128622
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Updated at: 2026-04-20 08:56:29 +0900
Published on MDR: 2026-04-20 10:25:48 +0900
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