J. W. Liu
(National Institute for Materials Science)
;
T. Teraji
(National Institute for Materials Science)
;
B. Da
(National Institute for Materials Science)
;
Y. Koide
(National Institute for Materials Science)
Description:
(abstract)High-performance boron-doped diamond (B-diamond) metal-oxide-semiconductor field-effect transistors (MOSFETs) are fabricated. Drain current maximum values for the B-diamond MOSFETs working at room temperature (RT) and 300 °C are −1.2 and −10.9 mA/mm, respectively. Both of them show on/off ratios higher than 109 and their extrinsic transconductance maximum values are 29.0 and 215.7 μS/mm, respectively. These properties are better than those of the previous reported values for the B-diamond MOSFETs. This study is meaningful to push forward the development of diamond-based MOSFETs for high-temperature applications.
Rights:
Keyword: Boron-doped diamond
Date published: 2024-02-12
Publisher: AIP Publishing
Journal:
Funding:
Manuscript type: Author's original (Submitted manuscript)
MDR DOI: https://doi.org/10.48505/nims.4962
First published URL: https://doi.org/10.1063/5.0194424
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Updated at: 2024-11-16 08:30:13 +0900
Published on MDR: 2024-11-16 08:30:14 +0900
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