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The microstructural evolution of Cu/Mo nanomultilayers upon annealing was investigated by X-ray diffraction and transmission electron microscopy. The isothermal annealing process in the temperature ranges of 300 – 850°C was conducted to understand the thermal behavior of the sample and follow the transformation into a nanocomposite. Annealing at 600°C led to the initiation of grain grooving in the investigated nanomultilayer, and it degraded into a spheroidized nanocomposite structure at 800°C. The sample kept the as-deposited Cu {111}//Mo{110} fiber texture up to 850°C. The residual stress was investigated to explain microstructure changes. The activation energy of degradation kinetics of Cu/Mo nanomultilayers was determined to understand the rate-determining mechanism for the degradation of nanolaminate structures.

Rights:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

Keyword: Cu/Mo nanomultilayers, Annealing, X-ray diffraction, Fiber texture, Magnetron sputtering

Date published: 2024-12-31

Publisher: Taylor & Francis

Journal:

• Science and Technology of Advanced Materials (ISSN: 14686996) vol. 25 2357536

Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4532

First published URL: https://doi.org/10.1080/14686996.2024.2357536

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Updated at: 2024-06-04 08:30:28 +0900

Published on MDR: 2024-06-04 08:30:28 +0900