Souta MIYAI
;
Tomoharu HIRAYAMA
;
Eiji TOKUMARU
;
Kouta MIYANOUCHI
;
Tomoko KUSAWAKE
;
Yoshihisa MATSUMOTO
;
Akiko N. ITAKURA
Description:
(abstract)In order to secure the sample to the sample holder and create a structure that serves as a partition between the gas introduction system on the back of the sample and the ultra-high vacuum measurement chamber, a vacuum seal must be completed at the same time as the sample is fixed. We searched and tried sealing methods to perform permeation measurements on samples with several mm size, since standardized products such as international ConFlat flanges cannot be used for vacuum seals in these sizes.
Rights:
Date published: 2025-03-10
Publisher: Surface Science Society Japan
Journal:
Funding:
Manuscript type: Publisher's version (Version of record)
MDR DOI:
First published URL: https://doi.org/10.1380/vss.68.174
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Other identifier(s):
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Updated at: 2026-03-10 16:30:30 +0900
Published on MDR: 2026-03-10 13:44:47 +0900
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