Souta MIYAI
;
Tomoharu HIRAYAMA
;
Eiji TOKUMARU
;
Kouta MIYANOUCHI
;
Tomoko KUSAWAKE
;
Yoshihisa MATSUMOTO
;
Akiko N. ITAKURA
説明:
(abstract)In order to secure the sample to the sample holder and create a structure that serves as a partition between the gas introduction system on the back of the sample and the ultra-high vacuum measurement chamber, a vacuum seal must be completed at the same time as the sample is fixed. We searched and tried sealing methods to perform permeation measurements on samples with several mm size, since standardized products such as international ConFlat flanges cannot be used for vacuum seals in these sizes.
権利情報:
刊行年月日: 2025-03-10
出版者: Surface Science Society Japan
掲載誌:
研究助成金:
原稿種別: 出版者版 (Version of record)
MDR DOI:
公開URL: https://doi.org/10.1380/vss.68.174
関連資料:
その他の識別子:
連絡先:
更新時刻: 2025-04-11 17:20:19 +0900
MDRでの公開時刻: 2026-03-10 13:44:47 +0900
| ファイル名 | サイズ | |||
|---|---|---|---|---|
| ファイル名 |
2025_miyai_VSS_68_20181447.pdf
(サムネイル)
application/pdf |
サイズ | 3.8MB | 詳細 |