Download file (2.53 MB)
Download as zip (2.12 MB)

Collection

Citation

Description:

The nano-opto-electro-mechanical systems (NOEMS) are a class of hybrid solid devices that hold promises in both classical and quan- tum manipulations of the interplay between optical, electrical and mechanical degrees of freedom. To date, studies of NOEMS using van der Waals (vdW) heterostructures are very limited, although vdW materials are known for emerging phenomena such as spin, valley, and topological physics. Here, we devise a universal method to easily and robustly fabricate vdW heterostructures into an architecture that hosts opto-electro-mechanical couplings in one single device. We demonstrated several functionalities, including nano-mechanical resonator, vacuum channel diodes, and ultra-fast thermo-radiator, using monolithically sculpted graphene NOEMS as a platform. Quality factors of mechanical resonances in them are found to exceed 103 at room temperature, while Joule heating can be modulated into ultra-fast thermo-radiation with ∼13 ns pulses. In the thermionic emission domain, nano vacuum channel diodes with on-off ratios of 105 can be achieved, with an emission current density reaching 104 A/m2 . Our results suggest that the introduction of the vdW het- erostructure into the NOEMS family will be of particular potential for the development of novel lab-on-a-chip systems.

Rights:

• Creative Commons BY Attribution 4.0 International
  

Keyword: Nano-opto-electro-mechanical systems, van der Waals heterostructures, graphene

Date published: 2022-03-01

Publisher: Springer Science and Business Media LLC

Journal:

• Light: Science & Applications (ISSN: 20477538) vol. 11 issue. 1 48

Funding:

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1038/s41377-022-00734-7

Related item:

Other identifier(s):

Contact agent:

Updated at: 2025-02-26 12:30:46 +0900

Published on MDR: 2025-02-26 12:30:46 +0900