@misc{tongyao2022a,
  title = {A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler},
  author = {Tongyao Zhang, Hanwen Wang, Xiuxin Xia, Ning Yan, Xuanzhe Sha, Jinqiang Huang, Kenji Watanabe, Takashi Taniguchi, Mengjian Zhu, Lei Wang, Jiantou Gao, Xilong Liang, Chengbing Qin, Liantuan Xiao, Dongming Sun, Jing Zhang, Zheng Han, Xiaoxi Li},
  publisher = {Springer Science and Business Media LLC},
  year = {2022-03-01},
  keywords = {Nano-opto-electro-mechanical systems, van der Waals heterostructures, graphene}
}