Article Dry Transfer of van der Waals Junctions of Two-Dimensional Materials onto Patterned Substrates Using Plasticized Poly(vinyl chloride)/Kamaboko-Shaped Polydimethylsiloxane

Momoko Onodera ORCID ; Manabu Ataka ; Yijin Zhang ORCID ; Rai Moriya ORCID ; Kenji Watanabe SAMURAI ORCID ; Takashi Taniguchi SAMURAI ORCID ; Hiroshi Toshiyoshi ; Tomoki Machida ORCID

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Momoko Onodera, Manabu Ataka, Yijin Zhang, Rai Moriya, Kenji Watanabe, Takashi Taniguchi, Hiroshi Toshiyoshi, Tomoki Machida. Dry Transfer of van der Waals Junctions of Two-Dimensional Materials onto Patterned Substrates Using Plasticized Poly(vinyl chloride)/Kamaboko-Shaped Polydimethylsiloxane. ACS Applied Materials & Interfaces. 2024, 16 (45), 62481-62488. https://doi.org/10.1021/acsami.4c05972

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(abstract)

Two-dimensional (2D) materials can be transferred onto substrates with various surface structures, opening up multiple functions and applications for 2D materials in the form of suspended membranes. In this paper, we present a method for transferring exfoliated 2D crystal flakes from SiO2 substrates onto patterned substrates using a poly(vinyl chloride) (PVC) layer mounted on a polydimethylsiloxane (PDMS) stamp structure. 2D crystal flakes can be transferred onto various patterned structures such as grooves, round holes, and periodic hole or groove patterns. Our method can also be used to fabricate suspended van der Waals (vdW) heterostructures by assembling 2D crystal flakes on the PVC/PDMS stamp and then transferring them onto patterned substrates. The adhesiveness and curvature of the PVC/PDMS stamp were tuned, and a high successful transfer rate was realized due to the use of kamaboko-shaped (semicylindrical) PDMS and the addition of an appropriate amount of a high-viscosity plasticizer to the PVC layer. Taking advantage of this method, we demonstrate the facile fabrication, simply by transferring a vdW heterostructure onto an Au-coated groove substrate, of a suspended vdW field-effect transistor device with the carrier density tuned using ionic gating. This method enables the transfer of 2D crystal flakes and vdW heterostructures onto various patterned substrates, and hence it should help to advance suspended 2D materials research.

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Keyword: 2D materials, suspended membranes, PVC/PDMS stamp

Date published: 2024-11-13

Publisher: American Chemical Society (ACS)

Journal:

  • ACS Applied Materials & Interfaces (ISSN: 19448244) vol. 16 issue. 45 p. 62481-62488

Funding:

  • JST-Mirai Program JPMJMI21G9
  • Tokyo Electron
  • Core Research for Evolutional Science and Technology JPMJCR20B4
  • Precursory Research for Embryonic Science and Technology JPMJPR20L5
  • Japan Society for the Promotion of Science JP21H05232
  • Japan Society for the Promotion of Science JP21H05233
  • Japan Society for the Promotion of Science JP21H05234
  • Japan Society for the Promotion of Science JP22H01898
  • Japan Society for the Promotion of Science JP22K18317
  • Japan Society for the Promotion of Science JP24K01293
  • Japan Society for the Promotion of Science JP24K16991
  • Japan Society for the Promotion of Science JP24K21195
  • Support Center for Advanced Telecommunications Technology Research Foundation

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1021/acsami.4c05972

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Updated at: 2025-02-05 12:31:32 +0900

Published on MDR: 2025-02-05 12:31:32 +0900

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