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説明:

Two-dimensional (2D) materials can be transferred onto substrates with various surface structures, opening up multiple functions and applications for 2D materials in the form of suspended membranes. In this paper, we present a method for transferring exfoliated 2D crystal flakes from SiO2 substrates onto patterned substrates using a poly(vinyl chloride) (PVC) layer mounted on a polydimethylsiloxane (PDMS) stamp structure. 2D crystal flakes can be transferred onto various patterned structures such as grooves, round holes, and periodic hole or groove patterns. Our method can also be used to fabricate suspended van der Waals (vdW) heterostructures by assembling 2D crystal flakes on the PVC/PDMS stamp and then transferring them onto patterned substrates. The adhesiveness and curvature of the PVC/PDMS stamp were tuned, and a high successful transfer rate was realized due to the use of kamaboko-shaped (semicylindrical) PDMS and the addition of an appropriate amount of a high-viscosity plasticizer to the PVC layer. Taking advantage of this method, we demonstrate the facile fabrication, simply by transferring a vdW heterostructure onto an Au-coated groove substrate, of a suspended vdW field-effect transistor device with the carrier density tuned using ionic gating. This method enables the transfer of 2D crystal flakes and vdW heterostructures onto various patterned substrates, and hence it should help to advance suspended 2D materials research.

権利情報:

• Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
  

キーワード: 2D materials, suspended membranes, PVC/PDMS stamp

刊行年月日: 2024-11-13

出版者: American Chemical Society (ACS)

掲載誌:

• ACS Applied Materials & Interfaces (ISSN: 19448244) vol. 16 issue. 45 p. 62481-62488

研究助成金:

• JST-Mirai Program JPMJMI21G9
• Tokyo Electron
• Core Research for Evolutional Science and Technology JPMJCR20B4
• Precursory Research for Embryonic Science and Technology JPMJPR20L5
• Japan Society for the Promotion of Science JP21H05232
• Japan Society for the Promotion of Science JP21H05233
• Japan Society for the Promotion of Science JP21H05234
• Japan Society for the Promotion of Science JP22H01898
• Japan Society for the Promotion of Science JP22K18317
• Japan Society for the Promotion of Science JP24K01293
• Japan Society for the Promotion of Science JP24K16991
• Japan Society for the Promotion of Science JP24K21195
• Support Center for Advanced Telecommunications Technology Research Foundation

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1021/acsami.4c05972

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更新時刻: 2025-02-05 12:31:32 +0900

MDRでの公開時刻: 2025-02-05 12:31:32 +0900