SUMIYA, Masatomo
(National Institute for Materials Science
)
Description:
(abstract)The surface oxidation behavior of different GaN surfaces (the polar Ga-face (+c) and the nonpolar m-plane) under H2O vapor ambient was studied by continuous real-time monitoring of the O 1s core X-ray photoelectron spectra generated under synchrotron radiation. XPS measurements were performed at BL23SU, SPring-8. The O 1s core spectra were continuously obtained with about 30 s per scan at a binding energy of 538 to 525 eV. The first column of each scan is the binding energy, and the second column is the count rate. The data are in CSV and VAMAS formats. See the linked paper for experimental details.
Data origin type: other
Rights:
Creative Commons BY Attribution 4.0 International
Keyword: GaN, Gallium nitride, Surface oxidation, Oxidation, MOS structure, XPS, SPring-8
Date published: 2022-12-31
Publisher: NIMS
Journal:
Funding:
Manuscript type: Not a journal article
MDR DOI: https://doi.org/10.48505/nims.3848
First published URL: https://doi.org/10.1080/14686996.2022.2052180
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Updated at: 2024-01-05 22:11:14 +0900
Published on MDR: 2023-02-14 09:41:47 +0900
Specimen ID / 試料ID :
Description / 化学組成の説明 : Gallium nitride
Category / カテゴリ :
Category description / カテゴリの説明 :
Chemical composition ID / 組成ID : 25617-97-4
Name / 装置の名称 : BL23_XPS
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Model number / 型番 :
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Function description / 機能の説明 :
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Instrument operator / 装置操作者 :
Instrument managing organization / 装置管理組織 :
Description / 説明 :
Category /
カテゴリ
:
x-ray photoelectron spectroscopy
Category description / カテゴリの説明 :
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Analysis field description / 解析分野の説明 :
Measurement environment / 計測環境 :
Standarized procedure / 標準手順 :
Measured at / 計測時刻 :
| Filename | Size | |||
|---|---|---|---|---|
| Filename |
cGaN_H2O.zip
application/zip |
Size | 11.1 MB | Detail |
| Filename |
mGaN_H2O.zip
application/zip |
Size | 12 MB | Detail |
| Filename |
GaN_H2O.jpg
(Thumbnail)
image/jpeg |
Size | 432 KB | Detail |