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Description:

Surface-enhanced infrared absorption (SEIRA) boosts the sensitivity of infrared spectroscopy by leveraging the strong light–matter interactions induced by localized optical resonances in nanostructures. While most SEIRA studies have focused on metallic nanostructures, all-dielectric alternatives eliminate the unwanted optical ohmic losses as well as the collisional damping of the plasma waves, potentially enabling higher-performance and lower-cost vibrational infrared spectroscopic platforms. In this study, we fabricate silicon-based all-dielectric metasurfaces that support quasi-bound states in the continuum and systematically investigate their SEIRA performance by varying the thickness of the spin-coated polymethyl methacrylate films, radiative quality factors, and spectral detuning. Furthermore, we quantify the enhancement factor for vibrational signals originating from the surface-adsorbed molecules, achieving a SEIRA enhancement factor exceeding 10^4, which corresponds to the sensitivity at the monolayer level. Our findings provide practical design principles for metal-free, highly sensitive, and wavelength-selective infrared spectroscopy systems based on low-loss dielectric metasurfaces.

Rights:

• Creative Commons BY Attribution 4.0 International
  

Keyword: BIC, metasurfaces, SEIRA, silicon

Date published: 2025-12-17

Publisher: American Chemical Society (ACS)

Journal:

• ACS Photonics (ISSN: 23304022) vol. 12 issue. 12 p. 6876-6883

Funding:

• Japan Society for the Promotion of Science JP22K20496
• Japan Society for the Promotion of Science JP24K17583

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1021/acsphotonics.5c02042

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Updated at: 2025-12-19 08:31:09 +0900

Published on MDR: 2025-12-18 19:08:18 +0900