Citation Formats

OGIWARA, Toshiya, TANUMA, Shigeo. "Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering". Journal of The Surface Science Society of Japan. 17, no. 12. . (1996): https://doi.org/10.1380/jsssj.17.758