# Fileset

[4.29 Characterization of diamond MEMS cantilevers mitigating substrate interference effects _Liao.docx](https://mdr.nims.go.jp/filesets/fb792a1e-0a18-4cc8-8b95-65291cca244f/download)

## Creator

[Keyun Gu](https://orcid.org/0000-0002-7505-7744), Zilong Zhang, [Zhaozong Zhang](https://orcid.org/0009-0003-8745-4469), Jian Huang, [Yasuo Koide](https://orcid.org/0000-0001-8321-9822), [Satoshi Koizumi](https://orcid.org/0000-0003-4961-5658), [Meiyong Liao](https://orcid.org/0000-0003-1361-4266)

## Rights

[Creative Commons BY-NC Attribution-NonCommercial 4.0 International](https://creativecommons.org/licenses/by-nc/4.0/)

## Other metadata

[Optical properties of single-crystal diamond MEMS: mitigating substrate interference](https://mdr.nims.go.jp/datasets/6e892f31-0fcf-495f-85a2-5dba7dcfc64c)

## Fulltext