# Fileset

[JSA_Vol.1_No.2_227-233.pdf](https://mdr.nims.go.jp/filesets/f3bcdc60-35e1-4e89-96d0-125a027f1b03/download)

## Creator

[Ogiwara, Toshiya](https://orcid.org/0000-0002-7376-6571), [Tanuma, Shigeo](https://orcid.org/0000-0003-2628-9941)

## Rights



## Other metadata

[InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性](https://mdr.nims.go.jp/datasets/6a8fa441-ce7d-4137-a512-98eb0b62761f)

## Fulltext