# Fileset

[Ta3N5.thumb.png](https://mdr.nims.go.jp/filesets/ecc8c847-7938-4bdc-8dbd-769f1cb4aa09/download)

## Creator

[Masashi Ishii](https://orcid.org/0000-0003-0357-2832), Industrial Application and Partnership Division

## Rights

Creative Commons BY Attribution 4.0 International[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[XAFS spectrum of Tantalum nitride](https://mdr.nims.go.jp/datasets/e9e31717-6fbf-45c6-9cdb-bdef632bc6d6)

## Fulltext