# Fileset

[n-type_Si_sub.thumb.png](https://mdr.nims.go.jp/filesets/ebd7ed80-9a1d-4c99-bbe4-f22e3231238d/download)

## Creator

Industrial Application and Partnership Division, JASRI

## Rights

Creative Commons BY-NC-SA Attribution-NonCommercial-ShareAlike 4.0 International[Creative Commons BY-NC-SA Attribution-NonCommercial-ShareAlike 4.0 International](https://creativecommons.org/licenses/by-nc-sa/4.0/)

## Other metadata

[HAXPES spectra of n-type Si sub Sputtered](https://mdr.nims.go.jp/datasets/4ccca809-ce8e-4d1c-9361-ac2f93182589)

## Fulltext