# Fileset

[Vol.1_No.3_374-387.pdf](https://mdr.nims.go.jp/filesets/e97be594-6e59-41bf-add8-e3c306537f43/download)

## Creator

[Ogiwara, Toshiya](https://orcid.org/0000-0002-7376-6571), [Tanuma, Shigeo](https://orcid.org/0000-0003-2628-9941)

## Rights



## Other metadata

[InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告（I）](https://mdr.nims.go.jp/datasets/b2949618-3c32-471b-aedd-c0959c48b46c)

## Fulltext