# Fileset

[Shi_ACSnano2024.pdf](https://mdr.nims.go.jp/filesets/e7df79c1-9824-4d46-a58b-999357b7806e/download)

## Creator

[Yuhao Shi](https://orcid.org/0000-0002-7956-193X), [Masatake Tsuji](https://orcid.org/0000-0002-3404-6037), [Hanjun Cho](https://orcid.org/0009-0009-2834-8846), [Shigenori Ueda](https://orcid.org/0000-0001-9425-0614), [Junghwan Kim](https://orcid.org/0000-0001-9168-6260), [Hideo Hosono](https://orcid.org/0000-0001-9260-6728)

## Rights

Share — copy and redistribute the material in any medium or format for any purpose, even commercially.
Adapt — remix, transform, and build upon the material for any purpose, even commercially.[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway](https://mdr.nims.go.jp/datasets/b6ca8e74-7710-48c7-9ddf-d6c0c08c9569)

## Fulltext