# Fileset

[Ta3N5.thumb.png](https://mdr.nims.go.jp/filesets/e5776188-aca7-4253-975b-23cd90f481a9/download)

## Creator

[Masashi Ishii](https://orcid.org/0000-0003-0357-2832), Industrial Application and Partnership Division

## Rights

Creative Commons BY Attribution 4.0 International[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[XAFS spectrum of Tantalum nitride](https://mdr.nims.go.jp/datasets/aa83912a-7fc0-4cbe-925b-f4f9029b2eb6)

## Fulltext