# Fileset

[Wu 2025 J Appl Crystallogr nanoXRD UMAP HVPE GaN.pdf](https://mdr.nims.go.jp/filesets/e1743720-5a5e-4e54-ae57-b30dfcf547e9/download)

## Creator

Zhendong Wu, [Yusuke Hayashi](https://orcid.org/0000-0001-5672-1497), Tetsuya Tohei, Kazushi Sumitani, Yasuhiko Imai, Shigeru Kimura, Akira Sakai

## Rights

[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Machine learning assisted nanobeam X-ray diffraction based analysis on hydride vapor-phase epitaxy GaN](https://mdr.nims.go.jp/datasets/dbab871a-d7d4-4831-a48c-12c483d2950a)

## Fulltext