# Fileset

[Ta3N5.thumb.png](https://mdr.nims.go.jp/filesets/d3a9a1dc-cc2e-4c12-aeb0-4fd8ab1ecbf8/download)

## Creator

[Masashi Ishii](https://orcid.org/0000-0003-0357-2832), Industrial Application and Partnership Division

## Rights

Creative Commons BY Attribution 4.0 International[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[XAFS spectrum of Tantalum nitride](https://mdr.nims.go.jp/datasets/631dc2b8-4c9c-40b1-a7fd-3070f1e1845a)

## Fulltext