# Fileset

[Maunscript (Clean).docx](https://mdr.nims.go.jp/filesets/d089dc4d-d82e-4e5a-b88b-4688b0134343/download)

## Creator

Guo Chen, [Satoshi Koizumi](https://orcid.org/0000-0003-4961-5658), [Yasuo Koide](https://orcid.org/0000-0001-8321-9822), [Meiyong Liao](https://orcid.org/0000-0003-1361-4266)

## Rights

This document is the Accepted Manuscript version of a Published Work that appeared in final form in Accounts of Materials Research, copyright © 2024 Accounts of Materials Research. Co-published by ShanghaiTech University and American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://doi.org/10.1021/accountsmr.4c00139[In Copyright](http://rightsstatements.org/vocab/InC/1.0/)

## Other metadata

[Low-Energy Dissipation Diamond MEMS](https://mdr.nims.go.jp/datasets/188671f3-3ea8-4105-928f-976a527b93a4)

## Fulltext