# Fileset

[Revised chapter-20230509 -new.docx](https://mdr.nims.go.jp/filesets/cefa5ec0-54b8-4f0b-9723-ae3bc53572a4/download)

## Creator

[Zilong Zhang](https://orcid.org/0000-0002-9759-9253), [Meiyong Liao](https://orcid.org/0000-0003-1361-4266)

## Rights

[In Copyright](http://rightsstatements.org/vocab/InC/1.0/)

## Other metadata

[Single-Crystal Diamond MEMS Magnetic Sensor](https://mdr.nims.go.jp/datasets/adf4df76-1605-4501-ad3f-e1688ba66daa)

## Fulltext