# Fileset

[NDNC2025_abstract_MEMS　Gu.docx](https://mdr.nims.go.jp/filesets/cdce79e5-cee7-46cf-b111-f864e53cba8b/download)

## Creator

Keyun Gu, [Zilong Zhang](https://orcid.org/0000-0002-9759-9253), Wen Zhao, Guo Chen, [Yasuo Koide](https://orcid.org/0000-0001-8321-9822), [Satoshi Koizumi](https://orcid.org/0000-0003-4961-5658), [Meiyong Liao](https://orcid.org/0000-0003-1361-4266)

## Rights

[In Copyright](http://rightsstatements.org/vocab/InC/1.0/)

## Other metadata

[Revealing the Surface Adsorbates of Diamond Using MEMS Resonators](https://mdr.nims.go.jp/datasets/77aca9b8-047b-4ae1-b75f-3d4cb3984124)

## Fulltext

Revealing the Surface Adsorbates of Diamond Using MEMS ResonatorsKeyun Gu1,2, Zilong Zhang1, Wen Zhao1, Guo Chen1, Yasuo Koide1, Satoshi Koizumi1, and Meiyong Liao1*1 National Institute for Materials Sciences, Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan2 School of Materials Science and Engineering, Shanghai University, Shanghai 200444, PR Chinameiyong.liao@nims.go.jpSurface states of diamond determine the ultimate electronic properties of its electronic devices [1], which is attributed to the distinct adsorption characteristics. It is well known that hydrogen (H) and oxygen (O)-terminated diamond exhibits negative electron affinity (NEA) and positive electron affinity (PEA) [2, 3 others, it is not our finding], respectively. And they can adsorb ions of different polarity, which directly affects the physical and chemical properties of diamond surface. The H- and O-terminated diamond surfaces have been widely applied for semiconductor devices such as diode, transistors and photodetectors. Nevertheless, the nature of the surface adsorptions and thermal stability have been still mysterious because the in-situ realization of the surface properties of diamond relies on in-situ characterization equipment with ultra-high vacuum and high-sensitive diamond resonators.  In this work, we investigate the adsorption and desorption of the O-termination and H-termination diamonds by in-situ measuring the shift of the resonance frequency of single-crystal diamond (SCD) microelectromechanical system (MEMS) resonators (Fig. 1(a)) in a high-vacuum chamber under different temperatures [3,4]. The different adsorption and desorption process of the O- and H-terminated diamond surface is disclosed at different temperatures. It is revealed that the adsorbates on the O-terminated diamond surface desorbs markedly between 373 K and 723 K and completes desorption at 933 K, as shown in Fig. 1(b). While the adsorbates on the H-terminated diamond desorb gradually between 363 K and 573 K and desorb dramatically between 573 K and 693 K (Fig. 1(c)). Based on the shift of the resonator frequency, the desorbed mass of the adsorbates on the O-terminated and H-terminated diamond surface is calculated to be 2.2 pg and 6.6 pg, respectively, corresponding to the equivalent thickness of the adsorption layer of 0.4 nm and 0.9 nm, respectively. Moreover, the surface conductivity of the H-terminated diamond drops by 6 orders of magnitude between 298 K and 723 K (Fig. 1(d)). These results disclosed by diamond MEMS provide an alternate insight into the surface nature of the O- and H-terminated diamond surface.Figure 1 (a) Schematic diagrams of O- and H-terminated diamond MEMS. Frequency shifts dependence on processing temperatures: (b) O-terminated, and (c) H-terminated. (d) Surface conductivity of H-terminated diamond dependence on processing temperatures.References1. K. Gu, M. Liao et al, The 19th IEEE NEMS, pp. 1-4 (2024).2. K Gu, M. Liao et al, Adv. Funct. Mater., 2420238, (2024)3.3. K Gu, M. Liao et al, Carbon, 225: 119159 (2024).4. M Liao, Y Koide, Adv. Mater., 2010, 22(47) 5393-5397.image1.emf(a) (b)Δ࢓ ൌ ࢓૙૛ࢤࢌࢌ૙Δ࢓ ൌ ૛.2 pgΔ࢓ ൌ ࢓૙૛ࢤࢌࢌ૙Δ࢓ ൌ ૟.6 pg(c)(d)Or