# Fileset

[Sumiya-Si-XPS-SP8BL15.zip](https://mdr.nims.go.jp/filesets/b231b6eb-c5dc-4ad9-9317-e976f4274977/download)

## Creator

[SUMIYA, Masatomo](https://orcid.org/0000-0003-0960-3812)

## Rights

[Creative Commons BY-NC Attribution-NonCommercial 4.0 International](https://creativecommons.org/licenses/by-nc/4.0/)

## Other metadata

[XPS spectral data for p- and n-type Si wafers with various resistivities acquired at SPring-8 BL15](https://mdr.nims.go.jp/datasets/056286f2-bb8b-4892-8208-297df128bc89)

## Fulltext