# Fileset

[SPRING2026 - Abstract 595.pdf](https://mdr.nims.go.jp/filesets/ad0ddd1d-0e7f-4635-8c52-d0742be54c6d/download)

## Creator

[G. Chen](https://orcid.org/0009-0004-9263-5616), [W. Zhao](https://orcid.org/0000-0001-8159-8195), [Z. Zhang](https://orcid.org/0009-0003-8745-4469), [S. Koizumi](https://orcid.org/0000-0003-4961-5658), [M. Liao](https://orcid.org/0000-0003-1361-4266)

## Rights

[In Copyright](http://rightsstatements.org/vocab/InC/1.0/)

## Other metadata

[Ultrathin Single-Crystal Diamond NEMS Cantilevers for High-Sensitivity Nanomechanical Sensing](https://mdr.nims.go.jp/datasets/426b0a9e-fdd6-49e1-913a-73efb2b4fbc4)

## Fulltext

#00595Ultrathin  Single-CrystalDiamond NEMS Cantilevers  forHigh-Sensitivity NanomechanicalSensingT. Nanocarbons II: from synthesis to advancedapplicationsG.  Chen1,*,  W.  Zhao1,  Z.  Zhang1,  S.  Koizumi1,  M.Liao1.1National  Institute  for  Materials  Science  -  Tsukuba(Japan)*Corresponding author(s).Email: chen.guo@nims.go.jp (G.Chen)AbstractUltrathin  nanoelectromechanical  system(NEMS) resonators are essential for achievingultimate  force  and  mass  sensitivity,  yetfabricating  mechanically  robust  devices  withnanometer-scale thickness and low dissipationremains  a  major  challenge.  In  particular,conventional  semiconductor  materials  sufferfrom  enhanced  surface-related  losses  whenscaled to the nanoscale, while two-dimensional(2D) materials, despite their atomic thickness,face  limitations  in  reproducibility,controllability,  and  quality  (Q)  factors.  Thesechallenges motivate the search for an ultrathinNEMS  platform  that  combines  nanoscaledimensions with high mechanical stability andscalability.Here,  we  report  a  smart-cut-assisted  thinningstrategy  that  enables  the  reliable  batchfabrication of ultrathin single-crystal  diamond(SCD)  NEMS  cantilevers  with  thicknessesdown to 50 nm, representing the thinnest SCDNEMS  cantilevers  reported  to  date.  Thefabricated  devices  exhibit  well-controlledgeometries  and  preserve  high  crystallineintegrity, leading to resonance frequencies thatclosely  follow  Euler–Bernoulli  beam  theoryover a wide frequency range from 10 kHz to 3MHz. Despite their extreme aspect ratios,  theultrathin  diamond  cantilevers  maintain  highmechanical  performance,  with  quality  factorson the order of ~5×104 at room temperature.Benefiting  from  diamond's  ultralow  intrinsicdissipation,  absence  of  native  oxide,  andsuperior  thermal  conductivity,  the  resonatorsdemonstrate excellent thermal robustness. Thequality  factor  remains  above  6×103 attemperatures as high as 773 K, accompanied bya low temperature coefficient of frequency ofapproximately  -10  ppm/K.  Owing  to  thecombination  of  reduced  mass  and  high  Q-factors, the devices achieve a force sensitivityof ~10-17 N/Hz1/2 and a mass resolution downto 5.89×10-20 kg when operated in higher-ordermodes, approaching the performance of carbonnanotube-based  resonators  while  offering  farsuperior robustness and manufacturability.These  results  establish  ultrathin  single-crystaldiamond as a highly promising NEMS materialplatform  that  bridges  the  gap  betweenconventional  MEMS  materials  and  2Dnanomechanical  systems.  The  demonstratedfabrication  strategy  and  device  performanceopen a viable pathway toward scalable,  high-sensitivity,  and  thermally  stablenanomechanical  sensors  for  applications  inforce  spectroscopy,  mass  detection,  andoperation in harsh environments.14 March 2026 11:20:56