Dataset: Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Filename: Data221-Raw-data.zip Download
Content type: application/zip
Size: 240KB
Checksum: fac584d3e32827fadd9dbf6ad3782e26
