# Fileset

[Ta3N5.thumb.png](https://mdr.nims.go.jp/filesets/90d8bf68-f939-427f-89a9-1fb04403b9e9/download)

## Creator

[Masashi Ishii](https://orcid.org/0000-0003-0357-2832), Industrial Application and Partnership Division

## Rights

Creative Commons BY Attribution 4.0 International[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[XAFS spectrum of Tantalum nitride](https://mdr.nims.go.jp/datasets/9bc06da4-0c2f-42d7-9f95-fa68f7b6d159)

## Fulltext