# Fileset

[055207_1_5.0260753-2-8.pdf](https://mdr.nims.go.jp/filesets/8dc1d1b4-a439-4bfd-afe2-9184d50e6225/download)

## Creator

[Takayoshi Oshima](https://orcid.org/0000-0001-8550-9735), [Yuichi Oshima](https://orcid.org/0000-0001-8293-4891)

## Rights

[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Fabrication of air bridges on (100)                        β-Ga2O3 using crystallographic HCl gas                    etching](https://mdr.nims.go.jp/datasets/b62faa36-e94f-471d-b172-1cf22e4abf4e)

## Fulltext