# Fileset

[article.pdf](https://mdr.nims.go.jp/filesets/8806845e-4442-4532-b9ae-aef929e77507/download)

## Creator

[Takayoshi Oshima](https://orcid.org/0000-0001-8550-9735)

## Rights

[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles](https://mdr.nims.go.jp/datasets/9c8dc921-09a0-4a42-88e0-fb29825f89f7)

## Fulltext