# Fileset

[表面科学_13_1992_472.pdf](https://mdr.nims.go.jp/filesets/877ffc2c-f6b9-4427-97dd-2db2a1c933f8/download)

## Creator

[Ogiwara, Toshiya](https://orcid.org/0000-0002-7376-6571), [Tanuma, Shigeo](https://orcid.org/0000-0003-2628-9941), Nagasawa, Yuji, Ikeo, Nobuyuki

## Rights



## Other metadata

[Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage](https://mdr.nims.go.jp/datasets/a5392b2c-4135-4115-b315-0ab51718377e)

## Fulltext