# Fileset

[3.17 Oxygen-terminated diamond surface desorption induces low surface energy dissipation in diamond MEMS　LiaoR1.docx](https://mdr.nims.go.jp/filesets/86e2f59d-d8ce-4562-8be9-3856d9a73057/download)

## Creator

Keyun Gu, Zilong Zhang, Guo Chen, Jian Huang, [Yasuo Koide](https://orcid.org/0000-0001-8321-9822), [Satoshi Koizumi](https://orcid.org/0000-0003-4961-5658), Wen Zhao, [Meiyong Liao](https://orcid.org/0000-0003-1361-4266)

## Rights

[In Copyright](http://rightsstatements.org/vocab/InC/1.0/)

## Other metadata

[Oxygen-termination effect on the surface energy dissipation in diamond MEMS](https://mdr.nims.go.jp/datasets/6cb33157-efeb-46ae-8df9-2b08486fdc7d)

## Fulltext