# Fileset

[Epitaxial lateral overgrowth of m-plane -Ga2O3 by halide vapor phase epitaxy-1.pdf](https://mdr.nims.go.jp/filesets/86cee8c2-4a58-4b4d-a163-9211f3cfad05/download)

## Creator

[Yuichi Oshima](https://orcid.org/0000-0001-8293-4891), [Takashi Shinohe](https://orcid.org/0009-0000-5559-1432)

## Rights

[Creative Commons BY-NC Attribution-NonCommercial 4.0 International](https://creativecommons.org/licenses/by-nc/4.0/)

## Other metadata

[Epitaxial lateral overgrowth of            <i>m</i>            -plane α-Ga            <sub>2</sub>            O            <sub>3</sub>            by halide vapor phase epitaxy](https://mdr.nims.go.jp/datasets/5fc04f82-f9ef-4cf6-ab7c-da83e64ab86e)

## Fulltext