# Fileset [Ta-L1_Ta3N5_Si311_100ms_200624.ex3](https://mdr.nims.go.jp/filesets/832e56bb-044c-421f-a1cd-eaa99c003d9b/download) ## Creator [Masashi Ishii](https://orcid.org/0000-0003-0357-2832), Industrial Application and Partnership Division ## Rights Creative Commons BY Attribution 4.0 International[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/) ## Other metadata [XAFS spectrum of Tantalum nitride](https://mdr.nims.go.jp/datasets/058bac7d-8b88-4593-b583-0c548fafb5a3) ## Fulltext [EX_DATA] *DATE= *EX_SAMPLE= *EX_ATOM=Ta *EX_EDGE=L1 *EX_COMMENT= *EX_GONIO= *EX_ATTACHIMENT= *EX_TARGET= *EX_FILAMENT= *EX_MEASURE= *EX_I0_DETECTOR= *EX_I_DETECTOR= *EX_CRYSTAL= SI(111) *EX_2D= *EX_KV= *EX_MA= *EX_SLIT_DS= *EX_SLIT_RS= *EX_SLIT_H= *EX_REPEAT= *EX_AREA1= *EX_AREA2= *EX_AREA3= *EX_AREA4= *EX_AREA5= [EX_BEGIN] 11357.330975 -0.353841 11363.275186 -0.356696 11369.049046 -0.359555 11375.004700 -0.361593 11380.966949 -0.363293 11386.755951 -0.367094 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