# Fileset

[STAM Method SI submit final.pdf](https://mdr.nims.go.jp/filesets/7610bb38-122d-4a33-866e-4ce58f4f0799/download)

## Creator

[Daisuke Ogawa](https://orcid.org/0000-0002-4373-6435), Ryotaro Akagi, [Keitaro Sodeyama](https://orcid.org/0000-0002-9228-0729), [Yukiko K. Takahashi](https://orcid.org/0000-0001-9197-7236)

## Rights

[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Intrinsic magnetic properties for SmFe 12−xTx thin films via high-throughput experiments and machine learning techniques](https://mdr.nims.go.jp/datasets/cf6059d7-0239-466f-af99-8bf4664457cf)

## Fulltext

SUPPLEMENTAL MATERIALIntrinsic magnetic properties for SmFe12−xTx thin films via high-throughputexperiments and machine learning techniquesDaisuke Ogawa,1, ∗ Ryotaro Akagi,1 Keitaro Sodeyama,1 and Yukiko K. Takahashi1, †1National Institute for Materials Science, Tsukuba 305-0047, JapanTable S1: Summary of elements, corresponding fluorescence X-rays, and peak positions used in the XRFanalysis. Monochromators (LiF(200), PET, and Ge) were employed to isolate characteristic X-raywavelengths based on atomic numbers and fluorescence characteristics.1-12 phase additive elements, TElement Sm Fe Al Si Ti V Cr Mn Co Ni Mo Ru Rh Pd Ta WAtomic number 62 26 13 14 22 23 24 25 27 28 42 44 45 46 73 74Fluorescence X-ray Lα1 Kα1 Lα1Energies [keV] 5.64 6.40 1.49 1.74 4.51 4.95 5.41 5.90 6.92 7.48 17.48 19.28 2.70 2.84 8.15 8.39Monochromators LiF(200) PET LiF(200) Ge LiF(200)Peak Position [deg.] 66.3 57.6 143.8 109.0 86.3 77.1 69.5 63.0 52.9 48.7 20.3 18.4 89.1 83.6 44.5 43.11Table S2: Combinatorial deposition conditions and resulting compositions of SmyFe12−xTix thin films ateach positions.ID ConditionSputtering Power [W]PositionComposition [at.%] SmyFe12−xTixSm Fe Fe Ti Sm Fe Ti y 12-x x1 Deposition 1 120 120 120 25 No.2 9.08 86.45 4.46 1.20 10.80 0.592 Deposition 1 120 120 120 25 No.5 9.86 87.49 2.65 1.31 10.69 0.353 Deposition 1 120 120 120 25 No.8 10.47 86.63 2.90 1.40 10.60 0.394 Deposition 1 120 120 120 25 No.11 11.36 86.92 1.71 1.54 10.46 0.235 Deposition 2 100 120 120 25 No.2 6.41 89.19 4.40 0.82 11.18 0.566 Deposition 2 100 120 120 25 No.5 6.98 89.08 3.93 0.90 11.10 0.517 Deposition 2 100 120 120 25 No.8 7.93 88.60 3.47 1.03 10.97 0.458 Deposition 2 100 120 120 25 No.11 8.10 89.27 2.64 1.06 10.94 0.34TABLE S3: Comprehensive data of SmyFe12−xTx thin films including sputtering conditions, compositions,thickness, lattice constants, and magnetic properties.ID Gen. TPower [W] Posi. Compo. [at.%] SmyFe12−xTx Thick. Lattice const. Magnetic propertiesSm Fe Fe T No. Sm Fe T y 12-x x t[nm] a[nm] c[nm] Ms[T] Tc[K] Hk[T]1 1 Ti 120 120 120 25 2 9.08 86.45 4.46 1.20 10.80 0.59 327 0.848 0.4847 1.131 563.5 10.632 1 Ti 120 120 120 25 5 9.86 87.49 2.65 1.31 10.69 0.35 350 0.847 0.4868 1.1583 1 Ti 120 120 120 25 8 10.47 86.63 2.90 1.40 10.60 0.39 372 0.845 0.4879 1.204 526.14 1 Ti 120 120 120 25 11 11.36 86.92 1.71 1.54 10.46 0.23 378 0.844 0.4883 1.100 526.65 1 Ti 100 120 120 25 2 6.41 89.19 4.40 0.82 11.18 0.56 285 0.849 0.4795 1.3396 1 Ti 100 120 120 25 5 6.98 89.08 3.93 0.90 11.10 0.51 297 0.849 0.4805 1.425 539.8 10.937 1 Ti 100 120 120 25 8 7.93 88.60 3.47 1.03 10.97 0.45 322 0.850 0.4820 1.478 546.9 11.008 1 Ti 100 120 120 25 11 8.10 89.27 2.64 1.06 10.94 0.34 337 0.847 0.4830 1.426 545.0 10.909 1 V 120 120 120 25 2 8.31 87.10 4.59 1.09 10.91 0.60 331 0.849 0.4825 1.104 596.2 11.4810 1 V 120 120 120 25 5 9.20 87.21 3.59 1.22 10.78 0.47 352 0.849 0.4837 1.097 558.111 1 V 120 120 120 25 8 10.28 86.54 3.18 1.37 10.63 0.43 371 0.842 0.4854 1.22412 1 V 120 120 120 25 11 10.70 86.72 2.58 1.44 10.56 0.35 390 0.844 0.4865 1.128 549.213 1 V 105 120 120 25 2 6.54 88.75 4.71 0.84 11.16 0.60 297 0.858 0.4791 1.357 621.9(Table continues on the next page)∗ d.ogawa@shinetsu.jp† takahashi.yukiko@nims.go.jp2(Continued from previous page)ID Gen. TPower [W] Posi. Compo. [at.%] SmyFe12−xTx Thick. Lattice const. Magnetic propertiesSm Fe Fe T No. Sm Fe T y 12-x x t[nm] a[nm] c[nm] Ms[T] Tc[K] Hk[T]14 1 V 105 120 120 25 5 7.14 88.74 4.11 0.92 11.08 0.53 315 0.861 0.4794 1.345 596.415 0 V 105 120 120 25 8 8.03 88.71 3.26 1.05 10.95 0.43 36916 1 V 105 120 120 25 11 8.89 88.37 2.74 1.17 10.83 0.36 348 0.846 0.4829 1.323 11.1517 1 Mo 120 120 120 10 2 8.52 87.53 3.95 1.12 10.88 0.52 308 0.853 0.4803 1.128 517 11.0818 1 Mo 120 120 120 10 5 8.95 87.66 3.39 1.18 10.82 0.45 330 0.852 0.4813 1.146 520 9.0119 0 Mo 120 120 120 10 8 10.08 87.68 2.24 1.35 10.65 0.30 34520 1 Mo 120 120 120 10 11 10.36 86.94 2.71 1.39 10.61 0.36 363 0.845 0.4866 1.17321 1 Mo 110 120 120 6 2 7.18 90.80 2.02 0.93 11.07 0.26 284 0.852 0.4807 1.38522 1 Mo 110 120 120 6 5 7.76 90.37 1.87 1.01 10.99 0.24 302 0.848 0.4813 1.334 530 11.2023 1 Mo 110 120 120 6 8 8.26 91.37 0.38 1.08 10.92 0.05 313 0.846 0.4825 1.37924 1 Mo 110 120 120 6 11 8.47 91.05 0.48 1.11 10.89 0.06 328 0.843 0.4836 1.39325 0 W 120 120 120 12 2 7.12 88.61 4.27 0.92 11.08 0.55 317 1.03326 1 W 120 120 120 12 5 7.67 88.23 4.10 1.00 11.00 0.53 323 0.851 0.4798 1.214 529.7 10.8527 1 W 120 120 120 12 8 8.35 88.42 3.23 1.09 10.91 0.42 355 0.849 0.4809 1.23828 1 W 120 120 120 12 11 8.95 88.05 3.01 1.18 10.82 0.40 367 0.854 0.4816 1.16829 1 W 120 120 120 8 2 7.24 89.78 2.97 0.94 11.06 0.38 282 0.842 0.4801 1.32830 1 W 120 120 120 8 5 7.87 89.64 2.48 1.03 10.97 0.32 303 0.849 0.4810 1.318 542.2 10.2031 1 W 120 120 120 8 8 8.45 89.55 2.00 1.11 10.89 0.26 316 0.846 0.4823 1.34732 1 W 120 120 120 8 11 9.04 89.31 1.65 1.19 10.81 0.22 339 0.845 0.4836 1.27733 0 Ta 105 120 120 8 2 7.32 88.77 3.91 0.95 11.05 0.51 27534 0 Ta 105 120 120 8 5 7.65 89.23 3.13 0.99 11.01 0.41 29335 1 Ta 105 120 120 8 8 7.99 89.48 2.53 1.04 10.96 0.33 318 0.482 1.280 559.9 8.8836 1 Ta 105 120 120 8 11 8.73 88.97 2.29 1.15 10.85 0.30 318 0.4839 1.36837 1 Ta 114 130 130 5 2 7.62 90.46 1.92 0.99 11.01 0.25 285 0.847 0.481138 1 Ta 114 130 130 5 5 8.31 89.94 1.75 1.09 10.91 0.23 307 0.482139 0 Ta 114 130 130 5 8 9.19 89.57 1.24 1.21 10.79 0.16 32440 1 Ta 114 130 130 5 11 9.63 89.20 1.16 1.28 10.72 0.15 316 0.48541 1 NA 105 120 120 0 2 7.03 92.97 0.00 0.91 11.09 0.00 279 0.849 0.480 1.539 577.6 11.1542 1 NA 105 120 120 0 5 7.17 92.83 0.00 0.93 11.07 0.00 294 0.853 0.4798 1.560(Table continues on the next page)3(Continued from previous page)ID Gen. TPower [W] Posi. Compo. [at.%] SmyFe12−xTx Thick. Lattice const. Magnetic propertiesSm Fe Fe T No. Sm Fe T y 12-x x t[nm] a[nm] c[nm] Ms[T] Tc[K] Hk[T]43 0 NA 105 120 120 0 8 8.24 91.76 0.00 1.08 10.92 0.00 32244 1 NA 105 120 120 0 11 8.42 91.58 0.00 1.10 10.90 0.00 334 1.524 533.6 12.3745 1 Cr 105 120 120 25 2 5.92 81.90 12.18 0.76 11.24 1.55 296 0.854 0.4782 1.30246 0 Cr 105 120 120 25 5 6.59 84.10 9.31 0.85 11.15 1.20 30447 1 Cr 105 120 120 25 8 7.11 83.52 9.37 0.92 11.08 1.21 324 0.861 0.4783 1.42748 1 Cr 105 120 120 25 11 7.43 86.06 6.51 0.96 11.04 0.84 339 0.858 0.4789 1.37449 1 Cr 110 120 120 12 2 6.73 87.09 6.17 0.87 11.13 0.79 279 0.854 0.4793 1.50350 1 Cr 110 120 120 12 5 6.84 87.44 5.72 0.88 11.12 0.74 309 0.848 0.4798 1.39351 0 Cr 110 120 120 12 8 7.91 88.47 3.62 1.03 10.97 0.47 34052 1 Cr 110 120 120 12 11 8.38 88.53 3.09 1.10 10.90 0.40 349 0.847 0.482 1.369 573.6 11.253 0 Si 110 120 120 15 2 6.78 91.16 2.05 0.87 11.13 0.26 27754 0 Si 110 120 120 15 5 7.64 90.40 1.96 0.99 11.01 0.25 30955 1 Si 110 120 120 15 8 8.02 90.45 1.52 1.05 10.95 0.20 334 0.484456 1 Si 110 120 120 15 11 8.75 89.91 1.34 1.15 10.85 0.18 328 0.4828 1.290 566 10.6757 0 Al 110 120 120 15 2 6.64 91.29 2.07 0.85 11.15 0.27 271 1.39658 0 Al 110 120 120 15 5 7.32 90.95 1.73 0.95 11.05 0.22 29959 0 Al 110 120 120 15 8 8.25 90.34 1.40 1.08 10.92 0.18 32860 1 Al 110 120 120 15 11 9.35 90.43 0.22 1.24 10.76 0.03 328 0.833 0.484561 0 Al 115 120 120 20 2 6.43 91.04 2.53 0.82 11.18 0.32 28262 1 Al 115 120 120 20 5 7.66 90.27 2.06 1.00 11.00 0.27 303 0.4872 1.42563 1 Al 115 120 120 20 8 8.24 89.78 1.98 1.08 10.92 0.26 320 0.4857 1.52364 1 Al 115 120 120 20 11 8.55 89.90 1.55 1.12 10.88 0.20 337 0.845 0.4848 1.469 526.5 10.5365 0 Al 110 120 120 10 2 7.08 91.12 1.80 0.91 11.09 0.23 27866 1 Al 110 120 120 10 5 6.99 91.53 1.48 0.90 11.10 0.19 297 0.4855 1.46467 0 Al 110 120 120 10 8 7.96 90.81 1.23 1.04 10.96 0.16 32068 1 Al 110 120 120 10 11 7.51 91.37 1.12 0.97 11.03 0.15 334 0.847 0.4828 1.428 522.4 10.6669 0 Si 115 120 120 25 2 5.55 94.39 0.06 0.70 11.30 0.01 25570 0 Si 115 120 120 25 5 8.10 91.86 0.05 1.06 10.94 0.01 29671 0 Si 115 120 120 25 8 8.87 91.08 0.05 1.17 10.83 0.01 317(Table continues on the next page)4(Continued from previous page)ID Gen. TPower [W] Posi. Compo. [at.%] SmyFe12−xTx Thick. Lattice const. Magnetic propertiesSm Fe Fe T No. Sm Fe T y 12-x x t[nm] a[nm] c[nm] Ms[T] Tc[K] Hk[T]72 0 Si 115 120 120 25 11 8.74 91.17 0.08 1.15 10.85 0.01 33273 0 Si 110 120 120 7 2 6.50 92.21 1.29 0.83 11.17 0.17 25474 1 Si 110 120 120 7 5 6.77 92.18 1.06 0.87 11.13 0.14 262 0.4812 0.97075 1 Si 110 120 120 7 8 7.41 91.84 0.75 0.96 11.04 0.10 292 0.4816 1.50076 1 Si 110 120 120 7 11 8.02 91.23 0.75 1.05 10.95 0.10 319 0.862 0.4821 1.410 576.5 10.8477 1 Ta 112 120 120 8 2 6.49 90.20 3.30 0.83 11.17 0.42 269 1.48678 1 Ta 112 120 120 8 5 7.15 89.80 3.05 0.92 11.08 0.39 304 0.850 0.4796 1.43179 1 Ta 112 120 120 8 8 7.72 90.20 2.08 1.00 11.00 0.27 318 0.856 0.4800 1.41480 1 Ta 112 120 120 8 11 8.45 89.63 1.92 1.11 10.89 0.25 328 0.851 0.4815 1.416 571.5 11.4081 0 Mn 120 120 120 25 2 6.05 81.77 12.17 0.77 11.23 1.55 26982 0 Mn 120 120 120 25 5 6.75 82.42 10.83 0.87 11.13 1.39 30483 0 Mn 120 120 120 25 8 7.57 83.87 8.56 0.98 11.02 1.11 31884 0 Mn 120 120 120 25 11 8.90 83.21 7.89 1.17 10.83 1.04 32885 0 Mn 120 120 120 9 2 6.29 89.41 4.30 0.81 11.19 0.55 26986 0 Mn 120 120 120 9 5 6.48 89.47 4.05 0.83 11.17 0.52 30487 0 Mn 120 120 120 9 8 7.73 89.07 3.20 1.01 10.99 0.42 31888 0 Mn 120 120 120 9 11 8.30 89.25 2.45 1.09 10.91 0.32 32889 0 Ru 120 120 120 15 2 7.13 83.95 8.92 0.92 11.08 1.15 26990 0 Ru 120 120 120 15 5 7.56 84.70 7.74 0.98 11.02 1.00 30491 0 Ru 120 120 120 15 8 8.90 84.42 6.68 1.17 10.83 0.88 31892 0 Ru 120 120 120 15 11 9.54 84.83 5.62 1.27 10.73 0.75 32893 0 Ni 120 120 120 25 2 6.26 79.82 13.93 0.80 11.20 1.78 26994 0 Ni 120 120 120 25 5 6.72 80.74 12.54 0.86 11.14 1.61 30495 0 Ni 120 120 120 25 8 7.84 81.62 10.55 1.02 10.98 1.37 31896 0 Ni 120 120 120 25 11 8.52 82.41 9.07 1.12 10.88 1.19 32897 0 Ni 120 120 120 8 2 6.75 89.54 3.71 0.87 11.13 0.48 32098 0 Ni 120 120 120 8 5 7.23 89.44 3.33 0.93 11.07 0.43 36099 0 Ni 120 120 120 8 8 8.09 88.89 3.02 1.06 10.94 0.39 362100 1 Ni 120 120 120 8 11 9.02 88.65 2.33 1.19 10.81 0.31 376 0.4824 1.262(Table continues on the next page)5(Continued from previous page)ID Gen. TPower [W] Posi. Compo. [at.%] SmyFe12−xTx Thick. Lattice const. Magnetic propertiesSm Fe Fe T No. Sm Fe T y 12-x x t[nm] a[nm] c[nm] Ms[T] Tc[K] Hk[T]101 0 Ru 120 120 120 7 2 6.27 91.64 2.09 0.80 11.20 0.27 329102 0 Ru 120 120 120 7 5 6.36 91.70 1.95 0.81 11.19 0.25 354103 1 Ru 120 120 120 7 8 6.97 91.43 1.60 0.90 11.10 0.21 364 0.8516 0.4818 1.229104 1 Ru 120 120 120 7 11 7.72 90.86 1.43 1.00 11.00 0.19 370 0.8477 0.4825 1.224105 0 Ru 120 120 120 13 2 5.70 87.46 6.84 0.73 11.27 0.87 269106 0 Ru 120 120 120 13 5 6.39 88.04 5.57 0.82 11.18 0.71 304107 0 Ru 120 120 120 13 8 7.12 88.39 4.49 0.92 11.08 0.58 318108 0 Ru 120 120 120 13 11 8.08 88.16 3.76 1.05 10.95 0.49 328109 1 Mn 120 120 120 5 2 6.76 91.37 1.87 0.87 11.13 0.24 330 0.850 0.480 1.209110 1 Mn 120 120 120 5 5 7.29 90.97 1.73 0.94 11.06 0.22 345 0.850 0.480 1.233111 1 Mn 120 120 120 5 8 7.92 90.68 1.40 1.03 10.97 0.18 394 0.851 0.481 1.147112 1 Mn 120 120 120 5 11 8.46 90.20 1.34 1.11 10.89 0.18 394 0.842 0.482 1.187113 0 Pd 150 70 70 3 2 10.33 80.12 9.55 1.38 10.62 1.28 133114 0 Pd 150 70 70 3 5 10.53 79.64 9.83 1.41 10.59 1.32 151115 1 Pd 150 70 70 3 8 11.58 82.94 5.48 1.57 10.43 0.74 157 0.4836 0.802116 1 Pd 150 70 70 3 11 12.45 81.17 6.38 1.71 10.29 0.87 167 0.4831 0.833117 0 Pd 150 105 105 3 2 5.74 89.19 5.07 0.73 11.27 0.65 178118 0 Pd 150 105 105 3 5 6.24 89.81 3.95 0.80 11.20 0.51 191119 1 Pd 150 105 105 3 8 6.95 90.27 2.78 0.90 11.10 0.36 206 0.4834 1.173120 1 Pd 150 105 105 3 11 7.32 89.60 3.08 0.95 11.05 0.40 214 0.4832 1.245121 1 Rh 150 105 105 3 2 6.27 89.84 3.89 0.80 11.20 0.50 175 0.4829 1.309122 1 Rh 150 105 105 3 5 6.47 89.93 3.60 0.83 11.17 0.46 174 0.4823 1.396123 1 Rh 150 105 105 3 8 6.77 90.15 3.08 0.87 11.13 0.40 187 0.4817 1.360124 1 Rh 150 105 105 3 11 7.26 89.84 2.90 0.94 11.06 0.38 205 0.4817 1.3446