# Fileset

[Ta3N5.thumb.png](https://mdr.nims.go.jp/filesets/741c3968-e21a-42b1-ac92-820b5109a137/download)

## Creator

[Masashi Ishii](https://orcid.org/0000-0003-0357-2832), Industrial Application and Partnership Division

## Rights

Creative Commons BY Attribution 4.0 International[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[XAFS spectrum of Tantalum nitride](https://mdr.nims.go.jp/datasets/d67582a7-546a-41ac-b8c9-a345ceb2244c)

## Fulltext