# Fileset

[tsta_a_2378683_sm7557.pdf](https://mdr.nims.go.jp/filesets/735336fd-8c40-497e-8231-fb4e3e3f81f1/download)

## Creator

[Takayoshi Oshima](https://orcid.org/0000-0001-8550-9735), [Rie Togashi](https://orcid.org/0000-0002-9467-0755), [Yuichi Oshima](https://orcid.org/0000-0001-8293-4891)

## Rights

[Creative Commons BY Attribution 4.0 International](https://creativecommons.org/licenses/by/4.0/)

## Other metadata

[Plasma-free anisotropic selective-area etching of β-Ga            <sub>2</sub>            O            <sub>3</sub>            using forming gas under atmospheric pressure](https://mdr.nims.go.jp/datasets/73e55ce8-7a01-4ca9-a74d-46481247db58)

## Fulltext

Microsoft Word - FinalFile_supplementary_forming_gas_etching.docxSupplementary file 1  Plasma-free anisotropic selective-area etching of β-Ga2O3 using forming gas under atmospheric pressure Takayoshi Oshimaa*, Rie Togashib, and Yuichi Oshimaa  aResearch Center for Electronic and Optical Materials, National Institute for Materials Science, Tsukuba, Japan bDepartment of Engineering and Applied Sciences, Sophia University, Chiyoda-ku, Japan  CONTACT Takayoshi Oshima OSHIMA.Takayoshi@nims.go.jp   Supplementary file 2  1. Window designs Square, circular, radial-line, striped window patterns utilized in the experiments are shown in Figure S1 for easy understanding.  Figure S1. Designs of the window patterns used in the etching experiments. For further details, please refer to the original paper. Note that the ends of the line patterns are curved due to the finite size of the laser spot. Radial-line windowSquare window100 µm100 µm100 µm100 µmCircular window1.5 µmStriped window (Pattern T)1.2 µm1.8 µmStriped window (Pattern F)0.7 µm5.5 µm50 µm1.2 µm[010][201][010][201][010][201][010][201][010][201][010][201]