# Fileset

[表面科学_13_1992_595.pdf](https://mdr.nims.go.jp/filesets/6527b436-d2c1-4866-a816-930821860936/download)

## Creator

[OGIWARA, Toshiya](https://orcid.org/0000-0002-7376-6571), HARADA, Tomoko, [TANUMA, Shigeo](https://orcid.org/0000-0003-2628-9941)

## Rights



## Other metadata

[Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam](https://mdr.nims.go.jp/datasets/e237da97-d19d-4495-8653-428045dc6c1a)

## Fulltext