# Fileset

[表面科学_17_1996_758.pdf](https://mdr.nims.go.jp/filesets/6484724e-c9f8-4259-b4d4-153f173f849b/download)

## Creator

[OGIWARA, Toshiya](https://orcid.org/0000-0002-7376-6571), [TANUMA, Shigeo](https://orcid.org/0000-0003-2628-9941)

## Rights



## Other metadata

[Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering](https://mdr.nims.go.jp/datasets/061f3c47-1f7f-4a0f-8345-c925455c9ac1)

## Fulltext