# Fileset

[12_真空シンポジウム_2012-10-28_S.pdf](https://mdr.nims.go.jp/filesets/61466f62-fcf9-4b95-a860-c8856cb15ee3/download)

## Creator

[田沼 繁夫](https://orcid.org/0000-0003-2628-9941)

## Rights

[Creative Commons BY-NC Attribution-NonCommercial 4.0 International](https://creativecommons.org/licenses/by-nc/4.0/)

## Other metadata

[モノづくりを支える表面分析技術: 表面分析の現状とその課題](https://mdr.nims.go.jp/datasets/e57308dd-08ef-476e-a24e-03ad4ca8785d)

## Fulltext