# Fileset

[表面科学_17_1996_38.pdf](https://mdr.nims.go.jp/filesets/5b55a30b-7aa1-4c74-a101-02a611140408/download)

## Creator

[OGIWARA, Toshiya](https://orcid.org/0000-0002-7376-6571), [TANUMA, Shigeo](https://orcid.org/0000-0003-2628-9941)

## Rights



## Other metadata

[Auger Depth Profiling Analyses of InP/GaInAsP Multilayers](https://mdr.nims.go.jp/datasets/d2f4d5f9-4d9d-4bcc-9ac9-c1f834e6005f)

## Fulltext