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[FEATURE_06_WPI-MANA.pdf](https://mdr.nims.go.jp/filesets/541641e7-aa0f-4dd3-97d4-83f9e71ef986/download)

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International Center for Materials Nanoarchitectonics (WPI-MANA)

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In Copyright[In Copyright](http://rightsstatements.org/vocab/InC/1.0/)

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[[MANA E-BULLETIN Vol.6 - Feature] Advanced nano-fabrication technology catalyzing discovery and innovation at MANA](https://mdr.nims.go.jp/datasets/4eb8d532-cd17-48a7-aef6-c984320ac4ab)

## Fulltext

MANAMANA　AdvancedAdvancedtechnology catalyzing discovery technology catalyzing discovery and innovation at WPI-MANAand innovation at WPI-MANAToshihide Nabatame, Namiki Foundry ManagerToshihide Nabatame, Namiki Foundry ManagerInternational Center for Materials Nanoarchitectonicse-Bulletin Vol.06March 2019 RESEARCH HIGHLIGHTS:Photonic circuits hosting electromagnetic waves with pseudospinOrigins of macroscopic friction linked to energy landscape on the nanoscalePorous structure of a layered silicate with selective adsorption properties revealedFEATURE:FEATURE:nano-fabrication　AdvancedAdvancedtechnology catalyzing discovery technology catalyzing discovery and innovation at WPI-MANAand innovation at WPI-MANAToshihide Nabatame, Namiki Foundry ManagerToshihide Nabatame, Namiki Foundry Manager　F a c i l i t i e s  f o r  l i t h o g r a p h y  a n d nanofabrication were established at NIMS in 2004 under the leadership of Masakazu Aono, the Director the International Center for Materials Nanoarchitectonics (WPI-MANA) at  NIMS from 2007 to 2017. The facilities became a part of WPI-MANA in 2009 and are now referred to as the Namiki Foundry. 　“Researchers at  NIMS and WPI-MANA are experts in materials science but few have experience of lithography and device fabrication,” says Toshihide Nabatame,  Manager of  the Namiki Foundry (Former MANA Foundry). “So our role is to work with scientists in supporting their research on device fabrication.” 　T h e  N a m i k i  F o u n d r y  h a s  e i g h t cleanroom areas in i ts  235m² floor space.  The areas are drawing and photo lithography; wet process; etching; film deposition; nano measurement; nano analysis; heat treatment and dicing and wiring (Fig.1).　The Namiki Foundry staff prepare s a m p l e s  s u i t a b l e  v a r i o u s  t y p e  o f characterization, for example, production o f  d e v i c e s ,  u s i n g  e l e c t r o n  b e a m lithography to investigate properties of nanowires and nanosheets. Notably, they handle any kind of material including organic, inorganic, metals, insulators, m a g n e t i c ,  s u p e r c o n d u c t o r s  a n d composites.Effective communication in a bilingual environment　WPI-MANA i s  an  in t e rna t iona l research organization with researchers from all over the world and the Namiki Foundry includes bilingual staff to work with researchers from overseas on their projects. “Our bilingual staff have TOIEC scores of more than 900 and provide consultation, training and all the necesarry operations in Namiki Foundry all in English,” explains Nabatame. “Also Namiki Foundry staff room is located adjacent to the clean rooms and are available all day until 19:30 to handle enquiries and conduct experiments.” (Fig.2) The annual fees for using the facilities are 50,000 JPY for NIMS/WPI-MANA researchers and 100,000 JPY for guests and trainees. 　The Namiki  Foundry has played a  cr i t ical  role  in  the wide ranging successful research conducted at WPI-MANA.  “Our  success  i s  based  on e ffec t ive  communica t ion  wi th  the research staff at WPI-MANA,” says Nabatame. “We continue to welcome requests for consultation about research, tours of the facilities, and especially ‘nomikai (drink party)’!” Examples of projects undertaken at the Namiki FoundryOur role is to work with scientists in supporting their research on device fablication.nano-fabricationFig.1 Moisture sensor with interdigital    electrodesJ i n  K awa k i ta ,  T oyo h i r o  C h i k yo w.  D e t e c t i o n of Micro/Nano Droplet by Galvanic-Coupled Arrays. ECS Transactions. 75 [29] (2017) 51-59 10.1149/07529.0051ecstFig.2　RESEARCHHIGHLIGHTSOur role is to work with scientists in supporting their research on device fablication.Please visit our e-Bulletin website for details!More articles and Research Highlights are available.International Center for Materials Nanoarchitectonics（WPI-MANA）1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan☎ : +81-029-860-4709    : mana@nims.go.jpWPI-MANA e-Bulletin Searchhttps://www.nims.go.jp/mana/ebulletin/Toshihide NabatameNamiki Foundry ManagerPublications[1] Yasushi Ishiguro et al., “Optically controllable dual-gate organic transistor produced via phase separation between polymer semiconductor and photochromic spiropyran molecules.” ACS Applied Materials & Interfaces. 6, 10415-10420 (2014).[2] Ryoma Hayakawa et al., “Interface Engineering for Improving Optical Switching in a Diarylethene-Channel Transistor.” Organic Electronics. 21, 149-154 (2015).[3] Tohru Tsuruoka et al., “Laser patterning of optically reconfigurable transistor channels in a photochromic diarylethene layer.” Nano Letters. 16, 7474-7480 (2016).[4] Kazuyoshi Kobashi et al., “Negative differential resistance transistor with organic p-n heterojunction.” Advanced Electronic Materials. 3, 1700106-1-6 (2017). Thermoelectric device with     membrane structure for IR sensorTo be published in Micromachines by a. t. doan et al. Interdigital electrodes fabrication process    for membrane stress sensor (MSS)Towards a de facto standard for olfactory sensing, Genki Yoshikawa, MANA eBulletin vol.2, Feature videohttp://www.nims.go.jp/mana/ebulletin/feature_02.html